LIDT improvement of multilayer coatings by accurate analysis of fabrication steps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5963, Issue , 2005, Pages

  Krol, Hèléne ^a,b   Gallais, Laurent ^a   Commandré, Mireille ^a   Grèzes Besset, Catherine ^b   Torricini, Didier ^b   Lagier, Guy ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b CILAS Marseille   (France)

Author keywords

Antireflection coating; Cleaning; Laser Induced Damage; Polishing; SiO2; Ta 2O5

Indexed keywords

CLEANING; INFRARED RADIATION; LASER DAMAGE; MULTILAYERS; POLISHING; PROBABILITY; SILICA; STATISTICAL METHODS; SURFACE PROPERTIES;

LASER DAMAGE PRECURSORS; TA 2O5;

ANTIREFLECTION COATINGS;

EID: 33144490097     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625186     Document Type: Conference Paper

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