Surface acoustic wave velocity in single-crystal AlN substrates

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 1, 2006, Pages 251-254

  Bu, Gang ^a   Čiplys, Daumantas ^a,b   Shur, Michael ^a   Schowalter, Leo J ^c,d   Schujman, Sandra ^c   Gaska, Remis ^e  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b VILNIUS UNIVERSITY   (Lithuania)

^c Crystal IS Inc   (United States)

^d Rensselaer Polytechnic Institute   (United States)

^e SENSOR ELECTRONIC TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY RANGE; SURFACE ACOUSTIC WAVE VELOCITY;

ACOUSTIC WAVES; ALUMINUM COMPOUNDS; ELASTIC MODULI; SUBSTRATES;

SINGLE CRYSTALS;

EID: 33144463146     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1588412     Document Type: Article

References (19)

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