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Volumn 200, Issue 12-13, 2006, Pages 3980-3986

Formation of MoSi2-SiO2 coatings on molybdenum substrates by CVD/MOCVD

Author keywords

Chemical vapor deposition; Molybdenum disilicide; Organometallic CVD; Silicon dioxide

Indexed keywords

DEPOSITION; ELECTRON SPECTROSCOPY; FIELD EMISSION MICROSCOPES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLYBDENUM; OXIDATION RESISTANCE; SCANNING ELECTRON MICROSCOPY; SILICA; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EID: 32644475730     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.212     Document Type: Article
Times cited : (47)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.