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Volumn 200, Issue 12-13, 2006, Pages 3980-3986
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Formation of MoSi2-SiO2 coatings on molybdenum substrates by CVD/MOCVD
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Author keywords
Chemical vapor deposition; Molybdenum disilicide; Organometallic CVD; Silicon dioxide
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Indexed keywords
DEPOSITION;
ELECTRON SPECTROSCOPY;
FIELD EMISSION MICROSCOPES;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLYBDENUM;
OXIDATION RESISTANCE;
SCANNING ELECTRON MICROSCOPY;
SILICA;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
CYCLIC OXIDATION TEST;
ISOTHERMAL TEST;
MOLYBDENUM DISILICIDE;
MOLYBDENUM SUBSTRATE;
ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION;
SILICA COATINGS;
SILICONE COATINGS;
DEPOSITION;
ELECTRON SPECTROSCOPY;
FIELD EMISSION MICROSCOPES;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLYBDENUM;
OXIDATION RESISTANCE;
SCANNING ELECTRON MICROSCOPY;
SILICA;
SILICONE COATINGS;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
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EID: 32644475730
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.212 Document Type: Article |
Times cited : (47)
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References (21)
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