Effect of ammonia nitridation on the microstructure of MoSi2 coatings formed by chemical vapor deposition of Si on Mo substrates

Surface and Coatings Technology

Volumn 160, Issue 1, 2002, Pages 29-37

  Yoon, Jin Kook ^a   Lee, Jong Kwon ^b   Byun, Ji Young ^a   Kim, Gyeung Ho ^a   Paik, Young Hyun ^b   Kim, Jae Soo ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Ammonia nitridation; CVD; Microstructure; MoSi2 Si3N4 composite coating

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRACKS; DEPOSITION; GRAIN BOUNDARIES; MICROSTRUCTURE; MOLYBDENUM COMPOUNDS; SUBSTRATES; THERMAL EXPANSION;

COMPOSITE COATINGS;

AMMONIUM COMPOUNDS;

AMMONIA; CHEMICAL VAPOR DEPOSITION; COATING; COMPOSITE; MICROSTRUCTURE; MOLYBDENUM; SILICON;

EID: 0036786276     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00379-1     Document Type: Article

References (25)

1. Warmfeste und Korrosionsbestandige Sinterwerkstoffe 2