Investigation of island formation during through-mask electrochemical micromachining

Journal of the Electrochemical Society

Volumn 143, Issue 7, 1996, Pages 2305-2309

  Shenoy, R V ^a,b   Datta, M ^a,b   Romankiw, L T ^a,b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; ELECTRIC CURRENT DISTRIBUTION; ELECTROLYTIC POLISHING; FILM GROWTH; MATHEMATICAL MODELS; PHOTORESISTS; PROBLEM SOLVING;

ISLAND FORMATION; MOVING BOUNDARY ALGORITHM; SHAPE EVOLUTION; THROUGH MASK ELECTROCHEMICAL MICROMACHINING;

MICROMACHINING;

EID: 0030192804     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836997     Document Type: Article

References (14)

1. M. Datta and L. T. Romankiw, This Journal, 136, 285C (1989).
2. M. Datta, in Electrochemical Technology: Innovations and New Developments, N. Masuko, T. Osaka, and Y. Ito, Editors, Kodansha, Tokyo (1995); This Journal, 142, 3801 (1995).
3. M. Datta, in Electrochemical Technology: Innovations and New Developments, N. Masuko, T. Osaka, and Y. Ito, Editors, Kodansha, Tokyo (1995); This Journal, 142, 3801 (1995).
4. M. Datta and L. T. Romankiw, in Electrochemical Technology Applications in Electronics, L. T. Romankiw, M. Datta, T. Osaka, and Y. Yamazaki, Editors, PV 93-20, p. 123, The Electrochemical Proceedings Series, Pennington, NJ (1993); M. Datta and L. T. Romankiw, U.S. Pat. 5,284,554 (1994).
5. M. Datta and L. T. Romankiw, in Electrochemical Technology Applications in Electronics, L. T. Romankiw, M. Datta, T. Osaka, and Y. Yamazaki, Editors, PV 93-20, p. 123, The Electrochemical Proceedings Series, Pennington, NJ (1993); M. Datta and L. T. Romankiw, U.S. Pat. 5,284,554 (1994).
6. M. Datta, R. V. Shenoy, and L. T. Romankiw, J. Eng. Ind., 118, 29 (1996).
7. R. C. Alkire and H. Deligianni, This Journal, 135, 1093 (1988).
8. A. C. West, C. Madore, M. Matlosz, and D. Landolt, ibid., 139, 499 (1992).
9. C. A. Brebbia and J. Dominguez, Boundary Elements: An Introductory Course, McGraw Hill Inc., New York (1989).
10. R. V. Shenoy and M. Datta, This Journal, 143, 544 (1996).
11. C. B. Diem, B. Newman, and M. E. Orazem, ibid., 135, 2524 (1988).
12. A. C. West and J. S. Newman, ibid., 138, 1620 (1991).
13. J. M. Occhialini and J. J. L. Higdon, ibid., 139, 2845 (1992).
14. R. C. Alkire, H. Deligianni, and J-B. Ju, ibid., 137, 818 (1990).