Wear reduction method for frictionally fast feeding piezoactuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 2 A, 2006, Pages 1005-1011

  Kosaka, Kouji ^a,b   Iwabuchi, Tetsuya ^a   Baba, Tetsuro ^a   Endo, Taishi ^b   Hashiguchi, Hiroyuki ^b   Furukawa, Hiroyuki ^b   Egashira, Yoshiya ^c   Hashimoto, Seiji ^d   Touge, Mutsumi ^b   Uozumi, Kiyohiko ^e   Nakada, Akira ^b   Kubota, Hiroshi ^b   Ohmi, Tadahiro ^f  

^a KUMAMOTO UNIVERSITY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

^c Zygc KK   (Japan)

^d GUNMA UNIVERSITY   (Japan)

^e AOYAMA GAKUIN UNIVERSITY   (Japan)

^f TOHOKU UNIVERSITY   (Japan)

Author keywords

Contact type actuator; Durability; Friction force; Piezoactuator; Wear

Indexed keywords

ELECTRON BEAMS; FEEDING; PROBLEM SOLVING; SCATTERING;

CONTACT-TYPE ACTUATOR; FRICTION FORCE; PIEZOACTUATOR;

PIEZOELECTRIC DEVICES;

EID: 32244436841     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.1005     Document Type: Article

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