Wear mode control of drive tip of ultrasonic motor for precision positioning

Wear

Volumn 256, Issue 1-2, 2004, Pages 145-152

  Yamaguchi, T ^a   Adachi, K ^a   Ishimine, Y ^b   Kato, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b KYOCERA CORPORATION   (Japan)

Author keywords

Al2O3; Mild wear mode; PID controller; Precision stage positioning; Ultrasonic motor

Indexed keywords

ELECTRON BEAMS; MONITORING; MOTORS; WEAR OF MATERIALS;

ULTRASONIC MOTOR (USM);

ULTRASONIC MACHINE TOOLS;

MOTOR; POSITIONING SYSTEM; WEAR;

EID: 0347270238     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00371-5     Document Type: Article

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