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Volumn , Issue , 2005, Pages 347-350

In-plane and out-of-plane mechanical characterization of thin polysilicon

Author keywords

MEMS; Polysilicon; Reliability; Tensile strength; Young's modulus

Indexed keywords

ELASTIC MODULI; RELIABILITY; STIFFNESS; TENSILE STRENGTH; THIN FILMS;

EID: 32044450365     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (11)
  • 2
    • 0031168990 scopus 로고    scopus 로고
    • M-test: A test chip for MEMS material property measurement using electrostatically actuated test structures
    • P.M. Oostemberg and S.D. Senturia, "M-Test: a test chip for MEMS material property measurement using electrostatically actuated test structures", Journal of Microelectromechanical Systems, 6, 107-118, 1997.
    • (1997) Journal of Microelectromechanical Systems , vol.6 , pp. 107-118
    • Oostemberg, P.M.1    Senturia, S.D.2
  • 4
    • 0035948962 scopus 로고    scopus 로고
    • Tensile-mode fatigue testing of silicon films as structural material for MEMS
    • T. Ando, M. Shikida, K. Sato, "Tensile-mode fatigue testing of silicon films as structural material for MEMS", Sensor and Actuators A, 93, 70-75, 2001.
    • (2001) Sensor and Actuators A , vol.93 , pp. 70-75
    • Ando, T.1    Shikida, M.2    Sato, K.3
  • 5
    • 0036504397 scopus 로고    scopus 로고
    • A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
    • I. Chasiotis, W.G. Knauss, "A New Microtensile Tester for the Study of MEMS Materials with the aid of Atomic Force Microscopy", Experimental Mechanics, 42(1), 51-57, 2002.
    • (2002) Experimental Mechanics , vol.42 , Issue.1 , pp. 51-57
    • Chasiotis, I.1    Knauss, W.G.2
  • 7
  • 9
    • 24144489485 scopus 로고    scopus 로고
    • Rupture tests on polysilicon films through on-chip electrostatic actuation
    • Brussels, 9-12 May
    • F. Cacchione, B. De Masi, A. Corigliano, M. Ferrera, "Rupture tests on polysilicon films through on-chip electrostatic actuation", Proceedings: Eurosime04, Brussels, 9-12 May 2004.
    • (2004) Proceedings: Eurosime04
    • Cacchione, F.1    De Masi, B.2    Corigliano, A.3    Ferrera, M.4
  • 10
    • 32044437755 scopus 로고    scopus 로고
    • Extended version submitted to
    • Extended version submitted to Sensor Letters, 2005.
    • (2005) Sensor Letters
  • 11
    • 29144519486 scopus 로고    scopus 로고
    • Out of plane flexural behaviour of thin polysilicon films: Mechanical characterization and application of the Weibull approach
    • Berlin, 18-20 April
    • F. Cacchione, A. Corigliano, B. De Masi, M. Ferrera, "Out of plane flexural behaviour of thin polysilicon films: mechanical characterization and application of the Weibull approach", Proceedings: Eurosime05, Berlin, 18-20 April 2005.
    • (2005) Proceedings: Eurosime05
    • Cacchione, F.1    Corigliano, A.2    De Masi, B.3    Ferrera, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.