Hybrid plasma CVD of diamond-like carbon (DLC) at low temperatures

Journal of Materials Science

Volumn 32, Issue 7, 1997, Pages 1931-1936

  Tither, D ^a   Ahmed, W ^a   Ahmed, E ^b  

^a MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

^b BAHAUDDIN ZAKARIYA UNIVERSITY   (Pakistan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LOW TEMPERATURE TESTING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMOANALYSIS; WEAR RESISTANCE;

DIAMOND LIKE CARBON (DLC); HYBRID PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0031121206     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018529512387     Document Type: Article

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