Synthesis of diamond-like carbon films by nanopulse plasma chemical vapor deposition at subatmospheric pressure

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 11 A, 2004, Pages

  Ohtake, Naoto ^a   Saito, Takao ^b   Kondo, Yoshimasa ^b   Hosono, Shintaro ^a   Nakamura, Yukinori ^b   Imanishi, Yu Ichiro ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NGK Insulators   (Japan)

Author keywords

Atmospheric plasma; CVD; DLC; Hard coatings; Nanopulse plasma; SI thyristor

Indexed keywords

ELASTIC MODULI; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; RAMAN SPECTROSCOPY; THIN FILMS; THYRISTORS;

HARD COATINGS; NANOPULSE PLASMAS; STATIC INDUCTION (SI) THYRISTOR; SUBATMOSPHERIC PRESSURE;

DIAMOND LIKE CARBON FILMS;

EID: 11144310073     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.L1406     Document Type: Article

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