Preparation of Functionally Combined Wafers of PZT-Si for Microdevices

IEEJ Transactions on Sensors and Micromachines

Volumn 123, Issue 12, 2003, Pages 548-552

  Tanaka, Katsuhiko ^a   Sakurai, Atsushi ^a   Kubota, Teppei ^a   Sakabe, Yukio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

actuator; microdevice; PZT; sensor; Si

Indexed keywords

EID: 31844451401     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.123.548     Document Type: Article

References (10)

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