Preparation and characterization of epitaxial lead zirconate titanate films on Pt/MgO substrates by metalorganic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5812-5814

  Sakurai, Atsushi ^a   Shiratsuyu, Kohsuke ^a   Takagi, Hiroshi ^a   Sakabe, Yukio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

D E hysteresis loop; Epitaxial growth; Ferroelectrics; MgO; MOCVD; Pt; PZT; Thin film

Indexed keywords

EPITAXIAL GROWTH; FILM PREPARATION; HYSTERESIS; LEAD COMPOUNDS; LEAKAGE CURRENTS; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; PLATINUM; POLARIZATION; SUBSTRATES; THIN FILMS;

LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0031223025     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5812     Document Type: Article

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