Anodic bonding of lead zirconate titanate ceramics to silicon with intermediate glass layer

Sensors and Actuators, A: Physical

Volumn 69, Issue 2, 1998, Pages 199-203

  Tanaka, Katsuhiko ^a   Takata, Eiichi ^a   Ohwada, Kuniki ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Anodic bonding; Ceramics; Lead zirconate titanate; Piezoelectric actuator; Sensor; Si

Indexed keywords

ACTUATORS; CERAMIC MATERIALS; GLASS; LEAD COMPOUNDS; SILICON WAFERS;

ANODIC BONDING; LEAD ZIRCONATE TITANATE;

PIEZOELECTRIC TRANSDUCERS;

EID: 0032137383     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00060-0     Document Type: Article

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