Nanolithography based on photocatalysis of TiO2 using an atomic force microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5829-5831

  Kobayashi, Kenkichiro ^a   Tomita, Yasumasa ^a   Maeda, Yasuhiha ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Nanolithography; Photocatalysis; Stearic acid film; TiO2

Indexed keywords

ATOMIC FORCE MICROSCOPY; DECOMPOSITION; LITHOGRAPHY; PHOTOCATALYSIS; TITANIUM DIOXIDE; ULTRAVIOLET RADIATION;

CURRENT FLOW; STEARIC-ACID FILM; TIO2; TOPOGRAPHIC IMAGES;

NANOTECHNOLOGY;

EID: 31844440097     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5829     Document Type: Article

References (10)

1. M. Richardson, C.-S. Koay, K. Takenoshita, C. Keyser and M. Al-Rabban: J. Vac. Sci. & Technol. B 22 (2004) 785.
2. A. A. Talin, G. F. Cardinale, T. I. Wallow, P. Dentinger, S. Pathak, D. Chinn and D. R. Folk: J. Vac. Sci. & Technol. B 22 (2004) 781.
3. A. Chiba, M. Sugawara, H. Yamanashi and I. Nishiyama: Jpn. J. Appl. Phys. 42 (2003) 3784.
4. S. Kraemer, R. R. Fuierer and C. B German: Chem. Rev. 103 (2003) 4367.
5. J. P. Lee and M. S. Myung: J. Am. Chem. Soc. 126 (2004) 28.
6. K. Kobayashi, Y. Tomita and S. Yoshida: Trans. Mater. Res. Soc. Jpn. 25 (2000) 253.
7. K. Kobayashi, Y. Tomita and S. Yoshida: Nano Lett. 2 (2002) 925.
8. F. Matsuzaki, K. Inaoka, M. Okada and K. Sato: J. Cryst. Growth 69 (1984) 231.
9. U. Stafford, K. A. Gray, P. V. Kamat and A. Varma: Chem. Phys. Lett. 205 (1993) 55.
10. P. Sawunyama, A. Fujishima and K. Hashimoto: Chem. Commun. (1998) p. 2229.