Experimental evaluation of arrayed microcolumns with monolithic structure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 B, 2005, Pages 5565-5569

  Jeong, Jin Woo ^a   Kim, Dae Jun ^a   Kim, Ho Seob ^b   Choi, Sang Kuk ^a   Kim, Dae Yong ^a   Lee, Hyeong Rag ^c  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b SunMoon University   (South Korea)

^c Kyungpook National University   (South Korea)

Author keywords

Arrayed microcolumns; Deflector; Lithography; LTCC; Microlens; Monolithic

Indexed keywords

CERAMIC MATERIALS; COPPER; LITHOGRAPHY; MICROLENSES; OPTICAL MICROSCOPY; SILICON;

ARRAYED MICROCOLUMNS; DEFLECTOR; LTCC; MONOLITHIC;

ELECTRON EMISSION;

EID: 31844435743     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.5565     Document Type: Article

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