메뉴 건너뛰기




Volumn 5931, Issue , 2005, Pages 1-12

High-performance large-area ultra-broadband (UV to IR) nanowire-grid polarizers and polarizing beam-splitters

Author keywords

Aluminum RIE; Interference lithography; Nano grating; Nanoimprint lithography; Polarizer; Polarizing beam splitter; Wire grid

Indexed keywords

ALUMINUM RIE; POLARIZER; WIRE-GRID;

EID: 31744450188     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617898     Document Type: Conference Paper
Times cited : (7)

References (26)
  • 1
    • 84957525572 scopus 로고
    • High contrast polarizers for the near infrared
    • Polarization Considerations for Optical Systems II
    • M. Taylor and G. Bucher, "High contrast polarizers for the near infrared", SPIE Vol. 1166, pp. 446 - 453, Polarization Considerations for Optical Systems II, 1989.
    • (1989) SPIE , vol.1166 , pp. 446-453
    • Taylor, M.1    Bucher, G.2
  • 2
    • 0004838096 scopus 로고
    • The wire grid as a near-infrared polarizer
    • G. R. Bird and M. Parrish Jr., "The wire grid as a near-infrared polarizer", J. Opt. Soc. Am. Vol. 50, pp. 886 - 891, 1960.
    • (1960) J. Opt. Soc. Am. , vol.50 , pp. 886-891
    • Bird, G.R.1    Parrish Jr., M.2
  • 3
    • 84975538515 scopus 로고
    • Infrared transmission polarizers by photolithography
    • J. P. Auton, "Infrared transmission polarizers by photolithography," Applied Optics, Vol.6, pp. 1023-1027, 1967.
    • (1967) Applied Optics , vol.6 , pp. 1023-1027
    • Auton, J.P.1
  • 6
    • 0000638952 scopus 로고    scopus 로고
    • Al wire-grid polarizer using the s-polarization resonance effect at the 0.8-μm wavelength band
    • H. Tamada, T. Doumuki, T. Yamaguchi, and S. Matsumoto, "Al wire-grid polarizer using the s-polarization resonance effect at the 0.8-μm wavelength band", Opt. Lett., vol. 22, pp. 419-421, 1997.
    • (1997) Opt. Lett. , vol.22 , pp. 419-421
    • Tamada, H.1    Doumuki, T.2    Yamaguchi, T.3    Matsumoto, S.4
  • 7
    • 0000463538 scopus 로고    scopus 로고
    • Study on polarizing visible light by subwavelength-period metal-stripe gratings
    • B. Schnabel, E. B. Kley, and F. Wyrowski, "Study on polarizing visible light by subwavelength-period metal-stripe gratings," Opt. Eng., vol. 38, pp. 220 - 226, 1999.
    • (1999) Opt. Eng. , vol.38 , pp. 220-226
    • Schnabel, B.1    Kley, E.B.2    Wyrowski, F.3
  • 8
    • 0037866296 scopus 로고    scopus 로고
    • Selected papers on subwavelength diffractive optics
    • April, 2001
    • J. N. Mait and D. W. Prather Eds. (2001), "Selected Papers on Subwavelength Diffractive Optics", SPIE Milestone Series, V. MS 166, April, 2001.
    • (2001) SPIE Milestone Series, V. MS , vol.166
    • Mait, J.N.1    Prather, D.W.2
  • 10
    • 33846991038 scopus 로고    scopus 로고
    • New, high performance, durable polarizers for projection displays
    • C. Pentico, E. Gardner, D. Hansen, and R. Perkins, "New, high performance, durable polarizers for projection displays," SID 01 Digest 1287 - 1289 (2001).
    • (2001) SID 01 Digest , pp. 1287-1289
    • Pentico, C.1    Gardner, E.2    Hansen, D.3    Perkins, R.4
  • 11
    • 0038680512 scopus 로고    scopus 로고
    • Optical wire-grid polarizers at oblique angles of incidence
    • X. J. Yu and H. S. Kwok, "Optical wire-grid polarizers at oblique angles of incidence," J. Appl. Phys. 93, 4407 - 4412 (2003).
    • (2003) J. Appl. Phys. , vol.93 , pp. 4407-4412
    • Yu, X.J.1    Kwok, H.S.2
  • 12
    • 21244498219 scopus 로고    scopus 로고
    • Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon
    • April
    • M. Xu, H. P. Urbach, D. K. G. de Boer, and H. J. Cornelissen, "Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon", Opt. Express, Vol. 13, No. 7, April, 2005.
    • (2005) Opt. Express , vol.13 , Issue.7
    • Xu, M.1    Urbach, H.P.2    De Boer, D.K.G.3    Cornelissen, H.J.4
  • 15
    • 1842507123 scopus 로고
    • Chapter 14, Macmillan, New York
    • th ed., Chapter 14, Macmillan, New York, 1964.
    • (1964) th Ed.
    • Born, M.1    Wolf, E.2
  • 16
    • 84975564537 scopus 로고
    • Rigorous coupled-wave analysis of metallic surface-relief gratings
    • M. G. Moharam, and T. K. Gaylord, "Rigorous coupled-wave analysis of metallic surface-relief gratings," J. Opt. Soc. Am. A 3, pp.1780- 1787, 1986.
    • (1986) J. Opt. Soc. Am. A , vol.3 , pp. 1780-1787
    • Moharam, M.G.1    Gaylord, T.K.2
  • 17
    • 0029306568 scopus 로고
    • Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: Enhanced transmittance matrix approach
    • M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A 12, pp. 1077 - 1086, 1995.
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1077-1086
    • Moharam, M.G.1    Grann, E.B.2    Pommet, D.A.3    Gaylord, T.K.4
  • 18
    • 0030241250 scopus 로고    scopus 로고
    • Use of Fourier series in the analysis of discontinuous periodic structures
    • L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A 13, pp. 1870 - 1876, 1996.
    • (1996) J. Opt. Soc. Am. A , vol.13 , pp. 1870-1876
    • Li, L.1
  • 19
    • 0040708652 scopus 로고    scopus 로고
    • Fabrication of a new broadband TM-pass waveguide polarizer with a double-layer 190 nm metal gratings using nanoimprint lithography
    • J. Wang, Z. Yu, W. Wu, and S. Y. Chou, "Fabrication of a new broadband TM-pass waveguide polarizer with a double-layer 190 nm metal gratings using nanoimprint lithography"J. Vac. Sci. Tech., 17 (6), 2957-2960, 1999.
    • (1999) J. Vac. Sci. Tech. , vol.17 , Issue.6 , pp. 2957-2960
    • Wang, J.1    Yu, Z.2    Wu, W.3    Chou, S.Y.4
  • 20
    • 0000903445 scopus 로고    scopus 로고
    • Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
    • M. T. Li, J. Wang, L. Zhuang, and S. Y. Chou, "Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography", Applied Physics Letters, 76 (6), pp. 673-675 (2000).
    • (2000) Applied Physics Letters , vol.76 , Issue.6 , pp. 673-675
    • Li, M.T.1    Wang, J.2    Zhuang, L.3    Chou, S.Y.4
  • 21
    • 15744398693 scopus 로고    scopus 로고
    • Wafer based nano-structure manufacturing for integrated nano-optic devices
    • February
    • J. Wang, L. Chen, S. Tai, D. Deng, P. Sciortino, J. Deng, and F. Liu, "Wafer based nano-structure manufacturing for integrated nano-optic devices," J. Lightwave Technology, Vol. 23, No. 2, pp. 474 - 485, February 2005.
    • (2005) J. Lightwave Technology , vol.23 , Issue.2 , pp. 474-485
    • Wang, J.1    Chen, L.2    Tai, S.3    Deng, D.4    Sciortino, P.5    Deng, J.6    Liu, F.7
  • 22
    • 0142037327 scopus 로고
    • "Imprint of sub-25 nm vias and trenches in polymers
    • S. Y. Chou, P. Krauss, and P. J. Renstrom, "Imprint of sub-25 nm vias and trenches in polymers," Applied Physics Letters, Vol. 67, 3114 (1995).
    • (1995) Applied Physics Letters , vol.67 , pp. 3114
    • Chou, S.Y.1    Krauss, P.2    Renstrom, P.J.3
  • 23
    • 5344268855 scopus 로고    scopus 로고
    • Mold-assisted nanolithography: A process for reliable pattern replication
    • J. Haisma et al., "Mold-assisted nanolithography: A process for reliable pattern replication," J. Vac. Sci. Technol. B14, 4129 (1996).
    • (1996) J. Vac. Sci. Technol. , vol.B14 , pp. 4129
    • Haisma, J.1
  • 25
    • 0033262038 scopus 로고    scopus 로고
    • Fabrication of 200 nm period nanomagnet arrays using interferometric lithography and a negative resist
    • M. Farhoud, J. Ferrera, A.J. Lochtefeld, M.L. Schattenburg, C.A. Ross and Henry I. Smith, "Fabrication of 200 nm period nanomagnet arrays using interferometric lithography and a negative resist," J. Vac. Sci. Technol. B, 17(6), 3182-3185 (1999).
    • (1999) J. Vac. Sci. Technol. B , vol.17 , Issue.6 , pp. 3182-3185
    • Farhoud, M.1    Ferrera, J.2    Lochtefeld, A.J.3    Schattenburg, M.L.4    Ross, C.A.5    Smith, H.I.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.