Design investigation for three-dimensional uniformity of the mass transport field

Proceedings - Electrochemical Society

Volumn PV 2005-09, Issue , 2005, Pages 120-127

  Krumdieck, Susan P ^a   Baluti, Silviu I ^a   Marcus, Leonid ^b   Peled, Ady ^b  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

^b RAFAEL   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ISOTHERMS; MATHEMATICAL MODELS; TRANSPORT PROPERTIES; VISCOUS FLOW;

EVACUATED CHAMBERS; GEOMETRICAL CONFIGURATION; MASS TRANSPORT FIELDS;

CHEMICAL VAPOR DEPOSITION;

EID: 31744439111     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. M.L. Hitchman and K.F. Jensen, Chemical Vapor Deposition, p.7, Academic Press, London (1993).
2. US Patent No. 5,451,260. CRFD-1394-Raj, et al Sono-Tek Corp. (1986).
3. S. Krumdieck and R. Raj, Journal of the American Ceramic Society, 82[6] (1999) 1605-07
4. S.P. Krumdieck, J-Y Lee, and H. Raatz, Journal of the Electrochemical Society Proceedings of CVD-XVI/EUROCVD-14 2003-08 (2003) 179-185.
5. S. Krumdieck, Acta Materialia, 49 (2001) 583-588.
6. Funakubo, H., K. Tokita, T. Oikawa and M. Aratani, Journal of Applied Physics, 92 no.9 (2002) 5448-5452.
7. S. Krumdieck and R. Raj, Surface Coatings and Technology, 141 (2001) 7-14.