Growth mechanism of sputtered amorphous silicon thin films

Physica B: Condensed Matter

Volumn 373, Issue 1, 2006, Pages 33-41

  Abdesselem, S ^a   Aida, M S ^b   Attaf, N ^b   Ouahab, A ^c  

^a UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

^b Universite Mentouri Constantine   (Algeria)

^c KASDI MERBAH UNIVERSITY   (Algeria)

Author keywords

Amorphous silicon; Growth mechanism; Sputtering; Thin films

Indexed keywords

AMORPHOUS SILICON; FILM GROWTH; POWER CONTROL; SPUTTERING;

DISORDERED FILM; GROWTH MECHANISM; GROWTH REGION;

THIN FILMS;

EID: 31644450302     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2005.10.132     Document Type: Article

References (49)

1. R.C. Chittick, J.H. Alexander, and H.F. Sterling J. Electrochem. Soc. 77 1969 116
2. W.E. Spear, and P.G. Le Comber Solid State Commun. 17 1975 1193
3. R.C. Ross, and R. Messier J. Appl. Phys. 52 1981 5329
4. E.C. Freeman, and W. Paul Phys. Rev. B 20 1979 716
5. J.L. Andjuar, E. Bertin, A. Cannillas, J. Campany, and J.L. Moranza J. Appl. Phys. 69 1991 3757
6. J. Shirafuji, M. Kawaguri, and Y. Ivanshi J. Appl. Phys. 32 1984 184
7. S. Kawasaki, K. Sato, K. Suzuki, H. Takeushi, K. Kurdiwa, and Y. Tarui Jpn. J. Appl. Phys. 6 1987 1400
8. P. Rocca i Cabbarocas, J.B. Chervrier, J. Huc, A. Lloret, J.Y. Parey, and J.P.M. Schmitt J. Vac. Sci. Technol. A 9 1991 244
9. R. Robertson, D. Hils, H. Shathan, and A. Gallagher Appl. Phys. Lett. 43 1983 544
10. D.A. Doughty, and A. Gallagher J. Appl. Phys. 67 1990 139
11. N. Itabashi, N. Nishikawa, M. Magane, S. Naito, T. Goto, A. Matsuda, C. Yamake, and E. Hirota Jpn. J. Appl. Phys. 29 1990 L505
12. A.M. Myers, J.R. Doyle, G.J. Feng, N. Maley, D.L. Ruzic, and J.R. Abelson J. Non-Cryst. Solid 137&138 1999 783
13. M. Katiyar, G.F. Feng, Y.H. Yang, D.R. Abelson, and N. Maley Appl. Phys. Lett. 63 1994 461
14. M. Katiyar, Y.H. Yang, and J.R. Abelson J. Appl. Phys. 77 1995 6247
15. J.R. Abelson Appl. Phys. A 56 1993 493
16. J.R. Abelson, N. Maley, J.R. Doyle, G.F. Feng, M. Fitzner, M. Katiyar, L. Mandrell, A.M. Myers, A. Nuruddin, D.L. Ruzic, and S. Yang Mater. Res. Sci. Symp. Proc. 219 1991 619
17. A. Nuruddin, J.R. Doyle, and J.R. Abelson J. Appl. Phys. 76 1994 3123
18. P. Roccas i Cabarrocas, Y. Bouizem, and M.L. They Philos. Mag. B 65 1992 1025
19. B.A. Scott, and J.A. Reimer J. Appl. Phys. 54 1983 6853
20. G. Ganguly, and A. Matsuda J. Non-Cryst. Solids 164-166 1993 31
21. A. Matsuda Plasma Phys. Control. Fusion 39 1997 A431
22. C.R. Wronski, B. Abeles, T. Tiedje, and G.D. Cody Sol. Stat. Commun. 44 1982 1423
23. D. Jousse, E. Buntarret, and F. Boulitrop Sol. Stat. Commun. 55 1985 435
24. G. Morell, R.S. Katiyar, S.Z. Weisz, H. Jia, J. Shinar, and I. Balberg J. Appl. Phys. 78 1995 5120
25. J.A. Thoronton Ann. Rev. Mater. Sci. 7 1977 239
26. A. Canillas, E. Bertran, J.L. Andüjar, and B. Drevillon J. Appl. Phys. 68 1990 2752
27. M. Matsuse, S. Tsuboi, M. Kawasaki, H. Koinuma, M. Eguchi, and H. Sakata Phys. Rev. B 53 1996 12585
28. D.A. Doughty, J.R. Doyle, G.H. Lin, and A. Gallagher J. Appl. Phys. 67 1990 6220
29. A.M. Antoine, and B. Drevillon J. Appl. Phys. 63 1988 360
30. A. Matsuda, K. Nomoto, Y. Takuchi, A. Suzuki, A. Yuuki, and J. Perrin Surf. Sci. 227 1990 50
31. J. Perrin, and T. Broekhuzen Appl. Lett. 50 1986 433
32. W.M.M. Kessels, M.C.M. Van de Sanden, R.J. Severens, and D.C. Schram J. Appl. Phys. 87 2000 3313
33. P. Jhon, and J.H. Prunell J. Chem. Soc. 169 1973 1455
34. A. Gallagher, and J. Scott Sol. Cells 21 1987 147
35. S. Veprêk, F.A. Sarrott, S. Rambert, and E. Taglauer J. Vac. Sci. Technol. A 7 4 1989 2614
36. J. Perrin, Y. Takeda, N. Hirano, Y. Takuchi, and A. Matsuda Surf. Sci. 210 1989 114
37. G.D. Cody, T. Tiedje, B. Abeles, B. Brooks, and Y. Goldstein Phys. Rev. Lett. 47 1981 1480
38. Z.E. Smith, and S. Wagner Phys. Rev. Lett. 59 1987 688
39. R.A. Street, J. Kakalios, C.C. Tsai, and T.M. Hayes Phys. Rev. B 35 1987 1316
40. K. Winner Phys. Rev. B 41 1990 12150
41. R.A. Street, and K. Winner Phys. Rev. B 40 1989 6236
42. R.A. Street, M. Hack, and W.B. Jackson Phys. Rev. B 37 1988 4209
43. Y. Bar Yam, D. Adler, and J.D. Joannopoulos Phys. Rev. Lett. 57 1986 467
44. H.M. Branz Phys. Rev. B 59 1999 5498
45. H.M. Branz Phys. Rev. B 60 1999 7725
46. M.S. Aida J. Non-Cryst. Solids 160 1993 99
47. S. Ramalingan, D. Marodas, and E.S. Aydil J. Appl. Phys. 84 1998 3895
48. P. Ho, W.G. Breiland, and R.J. Buss J. Chem. Phys. 91 1989 2627
49. P.R. Mc Curdy, K.H.A. Bogaert, N.F. Dalleska, and E.R. Fisher Rev. Sci. Instrum. 68 1997 1684