A low noise switched-capacitor interface circuit for sub-micro gravity resolution micromachined accelerometers

European Solid-State Circuits Conference

Volumn , Issue , 2002, Pages 635-638

  Kulah, Haluk ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; CRITICAL CIRCUITS; DIGITAL COMPENSATION; ELECTRICAL NOISE; INTERFACE CIRCUITS; MICROMACHINED ACCELEROMETERS; OPERATING FREQUENCY; SWITCHED CAPACITOR;

CAPACITANCE; CAPACITORS; CLOCKS; CMOS INTEGRATED CIRCUITS; LOGIC CIRCUITS;

ACCELEROMETERS;

EID: 31644447681     PISSN: 19308833     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, "Surface Micromachined Resonant Accelerometer," Transducers '97, Chicago, pp. 859-862, June 1997.
3. J. Bernstein, R. Miller, W. Kelley, and P. Ward, "Low-noise MEMS vibration sensor for geophysical applications," IEEE/ASME JMEMS, vol. 8, no. 4, pp. 433-438, Dec. 1999
4. N. Yazdi and K. Najafi, "An All-Silicon Single-Wafer-g accelerometer with a combined surface and bulk micromachining," Journal of MEMS, Vol. 9, No. 4, pp. 544550, Dec. 2000.
5. N. Yazdi and K. Najafi, "An Interface IC for a capacitive silicon-g accelerometer," ISSCC'99, pp. 132-133, 1999.
6. N. Yazdi, "Micro-g Silicon Accelerometers With High Performance CMOS Interface Circuitry," Ph. D. Dissertation, University of Michigan, 1999.
7. M. A. Lemkin, "Microaccelerometer Design with Digital Feedback Control," Ph. D. Dissertation, University of California, Berkeley, 1997.