Characterization of MgxZn1-xO films grown by remote-plasma-enhanced metalorganic chemical vapor-deposition using bis-ethylcyclopentadienyl magnesium

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 10, 2005, Pages 7267-7270

  Nakamura, Atsushi ^a   Yamamoto, Kenji ^a   Ishihara, Junji ^a   Aoki, Toru ^a   Temmyo, Jiro ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Bis ethylcyclopentadienyl magnesium (EtCp2Mg); Diethyl zinc (DEZn); MgxZn1 xO; Remote plasma enhanced MOCVD; Stokes' shift

Indexed keywords

ABSORPTION; CHARACTERIZATION; MAGNESIUM COMPOUNDS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DIETHYL ZINC (DEZN); MGXZN1-XO; REMOTE-PLASMA-ENHANCED MOCVD; STOKES' SHIFT;

THIN FILMS;

EID: 31544478846     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7267     Document Type: Article

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