Surface modification of CdTe crystal by plasma treatment using various gases

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 9 A, 2005, Pages 6714-6718

  Higa, Akira ^a   Nishihira, Atsushi ^a   Toyama, Hiroyuki ^a   Yamazato, Masaaki ^a   Maehama, Takehiro ^a   Ohno, Ryoichi ^b   Toguchi, Minoru ^a  

^a UNIVERSITY OF THE RYUKYUS   (Japan)

^b Acrorad Co Ltd   (Japan)

Author keywords

CdTe; Plasma treatment; Schottky contact; X ray photoelectron spectroscopy

Indexed keywords

GASES; MORPHOLOGY; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

CDTE; PLASMA TREATMENT; SCHOTTKY CONTACT;

CADMIUM COMPOUNDS;

EID: 31544467575     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.6714     Document Type: Article

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