Formation of carbon nitride compounds during successive implantations in copper

Journal of Electron Spectroscopy and Related Phenomena

Volumn 151, Issue 1, 2006, Pages 19-23

  Thome T ^a   Colaux, J L ^a   Louette, P ^a   Terwagne, G ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

Author keywords

Carbon; Implantation; Nitrogen; NRA; XPS

Indexed keywords

CHEMICAL REACTIONS; COPPER; NITROGEN COMPOUNDS; REACTION KINETICS; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE COMPOUNDS; IMPLANTATION; NON RESONANT NUCLEAR REACTIONS; NRA;

CARBON NITRIDE;

EID: 31444436672     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2005.10.001     Document Type: Article

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