Effect of substrate temperature on the deposition process and microstructure of ZnO films grown by ultrasonic spray pyrolysis method

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 19, Issue 3, 2004, Pages 641-646

  Bian, Ji Ming ^a   Li, Xiao Min ^a   Gao, Xiang Dong ^a   Yu, Wei Dong ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Thin film; Ultrasonic spray pyrolysis (USP); Zinc oxide

Indexed keywords

CRYSTAL MICROSTRUCTURE; THIN FILMS;

DEPOSITION PROCESS; SUBSTRATE TEMPERATURE; ULTRASONIC SPRAY PYROLYSIS;

ZINC OXIDE;

EID: 3142764407     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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