Theoretical analysis of the effect of static charges in silicon-based dielectric thin films on micro- to nanoscale electrostatic actuation

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 989-998

  Wu, Yan ^a   Shannon, Mark A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ELECTRIFICATION; MECHANICAL STIFFNESS; STATIC CHARGES;

DIELECTRIC FILMS;

EID: 3142761442     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/021     Document Type: Article

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