Phase differential angular rate sensor - Concept and analysis

IEEE Sensors Journal

Volumn 4, Issue 4, 2004, Pages 471-478

  John, James D ^a   Jakob, Conrad F ^a   Vinay, Thurai ^a   Qin, Lijiang ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

Angular rate (AR) sensor; Gyroscope; Microelectromechanical systems (MEMS); Modeling and analysis; Phase detection

Indexed keywords

ELECTROMAGNETISM; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; OSCILLATIONS;

ELECTROSTATIC ACTUATION; ELECTROTATIC FORCES; PHASE DETECTION;

SENSORS;

EID: 3142739419     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.830962     Document Type: Article

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