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Volumn , Issue , 2001, Pages 30-33
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A gyroscope array with linked-beam structure
a,b a,c a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ARRAYS;
GRAFTING (CHEMICAL);
MICROMACHINING;
POLYSILICON;
SPURIOUS SIGNAL NOISE;
STICTION;
THERMAL NOISE;
GYROSCOPE ARRAYS;
GYROSCOPES;
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EID: 0035015198
PISSN: 10846999
EISSN: None
Source Type: Journal
DOI: 10.1109/MEMSYS.2001.906471 Document Type: Article |
Times cited : (15)
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References (0)
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