A gyroscope array with linked-beam structure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 30-33

  Kim, Seokyu ^a,b   Lee, Byeungleul ^a,c   Lee, Joonyeop ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

^b Kong Hwa Ltd   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; GRAFTING (CHEMICAL); MICROMACHINING; POLYSILICON; SPURIOUS SIGNAL NOISE; STICTION; THERMAL NOISE;

GYROSCOPE ARRAYS;

GYROSCOPES;

EID: 0035015198     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906471     Document Type: Article

References (0)