Trident-type tuning fork silicon gyroscope by the phase difference detection

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 508-513

  Abe, Munemitsu ^a   Shinohara, Eiji ^a   Hasegawa, Kazuo ^a   Murata, Shinji ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MICROSENSORS; SEMICONDUCTING SILICON;

TUNING FORK SILICON GYROSCOPE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692572     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)