Unified analysis and mathematical representation of film-thickness behavior of film-substrate systems

Applied Optics

Volumn 45, Issue 2, 2006, Pages 235-264

  Zaghloul, A Rahman M ^a,b   Yousef, Mohamed S A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b ITR Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; POLARIZATION; SUBSTRATES; THICKNESS MEASUREMENT;

ELLIPSOMETRIC FUNCTIONS; FILM THICKNESS; FILM-SUBSTRATE INTERFACES;

FILMS;

EID: 31344433972     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000235     Document Type: Article

References (40)

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28. 1 = 1.
29. 1/2) dφ.
30. 1) the ratio of any term to the one before in the sequence of Eq. (39) is less than unity. Hence it is a convergent sequence.
31. In general, a domain is called m simply connected if the boundary of the same consists of m distinct boundaries.
32. A singular point of a function is isolated if the function is analytic at each point in some deleted neighborhood of that point.
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