Ellipsometric function of a film–substrate system: Detailed analysis and closed-form inversion

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 16, Issue 8, 1999, Pages 2029-2044

  Zaghloul, A R M ^a,b   Yousef, M S A ^c  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b ITR Technologies Inc   (United States)

^c NONE   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-FORM INVERSION;

FUNCTIONS; OPTICAL FILMS; SUBSTRATES;

ELLIPSOMETRY;

EID: 0032607461     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.16.002029     Document Type: Article

References (14)

1. A.-R. M. Zaghloul, “A study of the ellipsometric function of a film–substrate system and applications to the design of reflection-type optical devices and to ellipsometry,” Ph.D. dissertation (University of Nebraska–Lincoln, Lincoln, Nebraska, 1975).
2. M. M. Ibrahim and N. M. Bashara, “Parameter-correlation and computational considerations in multiple-angle ellipsometry,” J. Opt. Soc. Am. 61, 1622–1629 (1971).
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9. M. S. A. Yousef and A.-R. M. Zaghloul, “Ellipsometric function of a film–substrate system: characterization and detailed study,” J. Opt. Soc. Am. A 6, 355–366 (1989).
10. R. M. A. Azzam, A.-R. M. Zaghloul, and N. M. Bashara, “Ellipsometric function of a film–substrate system: applications to the design of reflection-type optical devices and to ellipsometry,” J. Opt. Soc. Am. 65, 252–260 (1975).
11. R. M. A. Azzam and M. E. R. Khan, “Complex reflection coefficients for parallel and perpendicular polarizations of a film–substrate system,” Appl. Opt. 22, 253–264 (1983).
12. A.-R. M. Zaghloul, R. M. A. Azzam, and N. M. Bashara, “Inversion of the nonlinear equations of reflection ellipsometry on film–substrate systems,” Surf. Sci. 5, 87–96 (1976).
13. The very simple singleelement rotating-polarizer ellipsometry may be used for only the zero and the negative systems; see A.-R. M. Zaghloul and R. M. A. Azzam, “Single-element rotatingpolarizer ellipsometer for film–substrate systems,” J. Opt. Soc. Am. 67, 1286–1287 (1977).
14. R. M. A. Azzam, A.-R. M. Zaghloul, and N. M. Bashara, “Polarizer–surface-analyzer null ellipsometry for film–substrate systems,” J. Opt. Soc. Am. 65, 1464–1471 (1975).