High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process

Microsystem Technologies

Volumn 12, Issue 3, 2006, Pages 187-192

  Yang, H ^a   Chein, Reiyu ^a   Tsai, T H ^a   Chang, J C ^b   Wu, J C ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Aspect ratio; Current density; Electroforming; HARM; Ion concentration

Indexed keywords

ASPECT RATIO; CATHODES; CURRENT DENSITY; MATHEMATICAL MODELS; METAL ANALYSIS; MICROSTRUCTURE;

ELECTROFORMING MODELING; HIGH ASPECT RATIO MICROSTRUCTURES (HARM); ION CONCENTRATION; LIGA PROCESS;

ELECTROFORMING;

EID: 31144451099     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0050-6     Document Type: Article

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