High-aspect-ratio microstructure filling by centrifugal force field modeling

Microsystem Technologies

Volumn 10, Issue 6-7, 2004, Pages 571-577

  Tsai, T H ^a   Yang, H ^a   Chein, R ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; HYDROPHILICITY; HYDROPHOBICITY; POROSITY; POROUS MATERIALS; ROTATION; SURFACE TENSION; TUBES (COMPONENTS);

CAPILLARY PRESSURE; CENTRIFUGAL FORCE; MICROSTRUCTURE FILLING; TUBE DIAMETER;

MICROSTRUCTURE;

EID: 10044273269     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0397-0     Document Type: Conference Paper

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