New electroforming technology pressure aid for LIGA process

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 351-356

  Tsai, T H ^a   Yang, H ^a,b   Chein, R ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NONE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BUBBLE FORMATION; CURRENT DENSITY; ELECTROLYTES; HYDROGEN; MICROSTRUCTURE; MORPHOLOGY; PLASTIC MOLDS; SCANNING ELECTRON MICROSCOPY; X RAY LITHOGRAPHY;

HIGH-ASPECT-RATIO (HAR) POLYMERS; METAL IONS; MICROELECTROFORMING; MICROGRAPHS;

ELECTROFORMING;

EID: 4644285627     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0425-0     Document Type: Conference Paper

References (10)

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