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Volumn 23, Issue 3, 2005, Pages 1084-1087
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Electron emission from boron nitride films deposited on patterned GaAs substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
CUBIC BORON NITRIDE;
CURRENT DENSITY;
ELECTRIC FIELD EFFECTS;
ELECTRON EMISSION;
ETCHING;
PHOTOLITHOGRAPHY;
SEMICONDUCTING GALLIUM ARSENIDE;
BORON NITRIDE FILMS;
PATTERNED SUBSTRATES;
THRESHOLD ELECTRIC FIELDS;
WET ETCHING;
THIN FILMS;
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EID: 31144450916
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1904636 Document Type: Article |
Times cited : (4)
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References (15)
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