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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 1089-1092

Field emission characteristics of boron nitride films

(5) Sugino, Takashi a Etou, Yoshihiro a Tagawa, Shigeru a Gamo, Mikka Nishitani b Ando, Toshihiro b,c

a OSAKA UNIVERSITY (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

c NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BORON COMPOUNDS; ELECTRON EMISSION; FLAME CLEANING; NITRIDES; PHOTOELECTRON SPECTROSCOPY; PLASMA APPLICATIONS; SURFACE STRUCTURE; THERMAL EFFECTS; ULTRAVIOLET SPECTROSCOPY;

BORON NITRIDE FILMS; NEGATIVE ELECTRON AFFINITY;

FIELD EMISSION CATHODES;

EID: 0034156286 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.591335 Document Type: Article

Times cited : (23)

References (14)

1
- 35949039711
- F. J. Himpsel, J. A. Knapp, J. A. van Vechten, and D. E. Eastman, Phys. Rev. B 20, 624 (1979).
- (1979) Phys. Rev. B , vol.20 , pp. 624
- Himpsel, F.J.¹ Knapp, J.A.² Van Vechten, J.A.³ Eastman, D.E.⁴

2
- 0002001169
- B. B. Pate, Surf. Sci. 165, 83 (1986).
- (1986) Surf. Sci. , vol.165 , pp. 83
- Pate, B.B.¹

3
- 0000892535
- J. van der Weide, Z. Zhang, P. K. Baumann, M. G. Wensell, J. Bernholc, and R. J. Nemanich, Phys. Rev. B 50, 5803 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 5803
- Van Der Weide, J.¹ Zhang, Z.² Baumann, P.K.³ Wensell, M.G.⁴ Bernholc, J.⁵ Nemanich, R.J.⁶

4
- 36449005072
- M. J. Powers, M. C. Benjamin, L. M. Porter, R. J. Nemanich, R. F. Davis, J. J. Cuomo, G. L. Doll, and S. J. Harris, Appl. Phys. Lett. 67, 3912 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3912
- Powers, M.J.¹ Benjamin, M.C.² Porter, L.M.³ Nemanich, R.J.⁴ Davis, R.F.⁵ Cuomo, J.J.⁶ Doll, G.L.⁷ Harris, S.J.⁸

5
- 0002027187
- K. P. Loh, I. Sakaguchi, M. N. Gamo, S. Tagawa, T. Sugino, and T. Ando, Appl. Phys. Lett. 74, 28 (1999).
- (1999) Appl. Phys. Lett. , vol.74 , pp. 28
- Loh, K.P.¹ Sakaguchi, I.² Gamo, M.N.³ Tagawa, S.⁴ Sugino, T.⁵ Ando, T.⁶

6
- 3643071013
- R. W. Pryor, Appl. Phys. Lett. 68, 1802 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1802
- Pryor, R.W.¹

7
- 0031272387
- H. H. Busta and R. W. Pryor, J. Appl. Phys. 82, 5148 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 5148
- Busta, H.H.¹ Pryor, R.W.²

8
- 0003784623
- H. H. Busta and R. W. Pryor, J. Vac. Sci. Technol. B 16, 1207 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 1207
- Busta, H.H.¹ Pryor, R.W.²

9
- 0001445260
- T. Sugino, K. Tanioka, S. Kawasaki, and J. Shirafuji, Jpn. J. Appl. Phys., Part 2 36, L463 (1997).
- (1997) Jpn. J. Appl. Phys., Part 2 , vol.36
- Sugino, T.¹ Tanioka, K.² Kawasaki, S.³ Shirafuji, J.⁴

10
- 0000078106
- T. Sugino, S. Kawasaki, K. Tanioka, and J. Shirafuji, Appl. Phys. Lett. 71, 2704 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2704
- Sugino, T.¹ Kawasaki, S.² Tanioka, K.³ Shirafuji, J.⁴

11
- 0000077540
- T. Sugino and S. Tagawa, Appl. Phys. Lett. 74, 889 (1999).
- (1999) Appl. Phys. Lett. , vol.74 , pp. 889
- Sugino, T.¹ Tagawa, S.²

12
- 0000733217
- C. Ronning, A. D. Banks, B. L. McCarson, R. Schlesser, Z. Sitar, R. F. Davis, B. L. Ward, and R. J. Nemanich, J. Appl. Phys. 84, 5046 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 5046
- Ronning, C.¹ Banks, A.D.² McCarson, B.L.³ Schlesser, R.⁴ Sitar, Z.⁵ Davis, R.F.⁶ Ward, B.L.⁷ Nemanich, R.J.⁸

13
- 0001089462
- J. Shirafuji, Y. Sakamoto, A. Furukawa, H. Shigeta, and T. Sugino, Diamond Relat. Mater. 4, 984 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 984
- Shirafuji, J.¹ Sakamoto, Y.² Furukawa, A.³ Shigeta, H.⁴ Sugino, T.⁵

14
- 0028466179
- I. Brodie and P. R. Schwoebel, Proc. IEEE 82, 1006 (1994).
- (1994) Proc. IEEE , vol.82 , pp. 1006
- Brodie, I.¹ Schwoebel, P.R.²

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