Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 3, 2005, Pages 908-917

  Lazzeri, P ^a   Vanzetti, L ^a   Anderle, M ^a   Bersani, M ^a   Park, J J ^b   Lin, Z ^b   Briber, R M ^b   Rubloff, G W ^b   Kim, H C ^c   Miller, R D ^c  

^a ITC IRST   (Italy)

^b UNIVERSITY OF MARYLAND   (United States)

^c IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

THERMAL TRANSFORMATIONS; VOLATILE PRODUCTS;

CROSSLINKING; DECOMPOSITION; DIELECTRIC MATERIALS; PHASE TRANSITIONS; POLYMETHYL METHACRYLATES; REACTION KINETICS; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILMS;

EID: 31144434759     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1900734     Document Type: Article

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