SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages 602-606

Influence of residual solvent in polymers patterned by nanoimprint lithography

(7) Gourgon, C a Tortai, J H a Lazzarino, F a Perret, C a Micouin, G a Joubert, O a Landis, S b

a CEA LETI (France)

b CEA GRENOBLE (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SCANNING CALORIMETRY; ELECTRON BEAM LITHOGRAPHY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FREQUENCIES; GLASS TRANSITION; INSULATING MATERIALS; MACROMOLECULES; PERMITTIVITY; PLASMAS; PRINTING; SCANNING ELECTRON MICROSCOPY; SOLVENTS; SPIN COATING; THIN FILMS;

DYNAMIC ELECTRICAL ANALYSIS (DEA); NANOIMPRINT LITHOGRAPHY (NIL); PLASTICIZING EFFECTS; POLYHYDROXYSTYRENE (PHS) BONDS;

POLYMERS;

EID: 2342473907 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1651554 Document Type: Article

Times cited : (13)

References (8)

1
- 0012752163
- S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2897
- Chou, S.Y.¹ Krauss, P.R.² Zhang, W.³ Guo, L.⁴ Zhuang, L.⁵

2
- 0033132695
- K. Pfeiffer, G. Bleidiessel, G. Gruetzner, H. Schulz, T. Hoffmann, H.-C. Scheer, C. M. SotomayorTorres, and J. Ahopelto, Microelectron. Eng. 46, 431 (1999).
- (1999) Microelectron. Eng. , vol.46 , pp. 431
- Pfeiffer, K.¹ Bleidiessel, G.² Gruetzner, G.³ Schulz, H.⁴ Hoffmann, T.⁵ Scheer, H.-C.⁶ Sotomayortorres, C.M.⁷ Ahopelto, J.⁸

3
- 0037274001
- S. Matsui, Y. Igaku, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Namatsu, and M. Komuro, J. Vac. Sci. Teehnol. B 21, 688 (2003).
- (2003) J. Vac. Sci. Teehnol. B , vol.21 , pp. 688
- Matsui, S.¹ Igaku, Y.² Ishigaki, H.³ Fujita, J.⁴ Ishida, M.⁵ Ochiai, Y.⁶ Namatsu, H.⁷ Komuro, M.⁸

4
- 0012582840
- S. Kawana and R. A. L. Jones, Phys. Rev. E 63, 021501 (2001).
- (2001) Phys. Rev. E , vol.63 , pp. 021501
- Kawana, S.¹ Jones, R.A.L.²

5
- 0032595502
- M. Ribeiro and J.-P. E. Grolier, J. Thermal Anal. Calorimetry 57, 253 (1999).
- (1999) J. Thermal Anal. Calorimetry , vol.57 , pp. 253
- Ribeiro, M.¹ Grolier, J.-P.E.²

6
- 0037207693
- C. Gourgon, C. Perret, G. Mieouin, F. Lazzarino, J. H. Tortai, O. Joubert, and J.-P. E. Grolier, J. Vac. Sci. Technol. B 21, 98 (2003).
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 98
- Gourgon, C.¹ Perret, C.² Mieouin, G.³ Lazzarino, F.⁴ Tortai, J.H.⁵ Joubert, O.⁶ Grolier, J.-P.E.⁷

7
- 2342627022
- Mac Afee, New Jersey Society of Plastics Engineers, Mid Huston Section, New York
- C. Gourgon, L. Pain, C. Higgins, B. Searfogliere, L. Mollard, B. Dal'Zotto, S. Tedesco, M. Ribeiro, R. Hanawa, T. Kusumoto, and M. Suetsugu, Proceedings of the 12th International Conference on Photopolymers, Mac Afee, New Jersey (Society of Plastics Engineers, Mid Huston Section, New York, 2000).
- (2000) Proceedings of the 12th International Conference on Photopolymers
- Gourgon, C.¹ Pain, L.² Higgins, C.³ Searfogliere, B.⁴ Mollard, L.⁵ Dal'Zotto, B.⁶ Tedesco, S.⁷ Ribeiro, M.⁸ Hanawa, R.⁹ Kusumoto, T.¹⁰ Suetsugu, M.¹¹

8
- 0029733619
- F. M. B. Coutinho and M. C. Delpech, Polym. Test. 15, 103 (1996).
- (1996) Polym. Test. , vol.15 , pp. 103
- Coutinho, F.M.B.¹ Delpech, M.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.