SCOPUS 정보 검색 플랫폼

Volumn 126, Issue 1, 2006, Pages 264-269

A very simple compensation technique for bent V-grooves in KOH etched (1 0 0) silicon when thin structures or deep etching are required

Author keywords

Compensation structure; KOH silicon etching; Micro machining

Indexed keywords

ETCHING; MICROMACHINING; MOLECULAR STRUCTURE; SILICON;

COMPENSATION STRUCTURE; KOH SILICON ETCHING;

POTASSIUM COMPOUNDS;

EID: 31044448975 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/j.sna.2005.09.014 Document Type: Article

Times cited : (12)

References (8)

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2
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- Compensation structures for convex corner micromachining in silicon
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- Puers, B.¹ Sansen, W.²

3
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- Effects of 〈1 1 0〉-oriented corner compensation structures on membrane quality and convex corner integrity in (1 0 0)-silicon using aqueous KOH
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- Van Kampen, R.P.¹ Wolffenbuttel, R.F.²

4
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- Compensating corner undercutting in anisotropic etching of (1 0 0) silicon
- X.P. Wu, and W.H. Ko Compensating corner undercutting in anisotropic etching of (1 0 0) silicon Sens. Actuators 18 1989 207 215
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- Wu, X.P.¹ Ko, W.H.²

5
- 0032050516
- Concave corner compensation between vertical (0 1 0)-(0 0 1) planes anisotropically etched in Si(1 0 0)
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- Nikpour, B.¹ Landsberger, L.M.² Hubbard, T.J.³ Kahrizi, M.⁴ Iftimie, A.⁵

6
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- Etching front control of 〈1 1 0〉 strips for corner compensation
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7
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- Fabrication of non-underetched convex corners in anisotropic etching of (1 0 0)-silicon in aqueous KOH with respect to novel micromechanic elements
- G.K. Mayer, H.L. Offereins, H. Sandmaier, and K. Kühl Fabrication of non-underetched convex corners in anisotropic etching of (1 0 0)-silicon in aqueous KOH with respect to novel micromechanic elements J. Electrochem. Soc. 137 1990 3947 3951
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8
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- Compensation structures for V-grooves connected to square apertures in KOH etched (1 0 0) silicon: Theory, simulation and experimentation
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- Wacogne, B.¹ Sadani, Z.² Gharbi, T.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.