MEMS phase shifters using cascaded slow-wave structures for improved impedance matching and/or phase shift

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2004, Pages 725-728

  Lakshminarayanan, B ^a   Weller, T ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGE; CASCADED SLOW-WAVE STRUCTURES; DISTRIBUTED MICRO-ELECTRO TRANSMISSION LINES (DMTL); MICROELECTROMECHANICAL SYSTEM (MEMS);

CAPACITORS; COMPUTER SIMULATION; DELAY CIRCUITS; ELECTRIC IMPEDANCE; ELECTRIC LINES; ELECTRIC POTENTIAL; ELECTRON BEAMS; PHASE SHIFTERS; THICKNESS MEASUREMENT; TOPOLOGY; TRANSMISSION ELECTRON MICROSCOPY; WAVEGUIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 4444338781     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Scott Barker and Gabriel Rebeiz, "Distributed True-Time Delay Phase Shifters and Wide-Band Switches," IEEE Trans. MTT, vol. 46, no. 11, pp. 1881-1889, Nov 1998.
2. Joseph S. Hayden and Gabriel Rebeiz, "Very Low-Loss Distributed X-Band and Ka-Band MEMS Phase Shifters Using Metal-Air-Metal Capacitors," IEEE Trans. MTT, vol. 51, no. 1, pp. 309-314, Jan 2003.
3. B. Lakshminarayanan and T. Weller, "Distributed MEMS Phase Shifters on Silicon Using Tapered Impedance Unit Cells," 2002 IEEE MTT-S, vol. 2, pp. 1237-1240
4. Andreas Borgioli, et al., "K-Band 3-bit Low - Loss Distributed MEMS Phase Shifter," IEEE Microwave and Guided Wave Letters, vol. 10, no. 10, pp. 415-417, Oct 2000.
5. Hong-Teuk Kim, "A V-band CPS Distributed Analog MEMS Phase Shifter," 2003 IEEE MTT-S, vol. 2, pp. 1481-1484.
6. Adnan Gorur et al., "Characteristics of Periodically Loaded CPW Structures," IEEE Microwave and Guided Wave Letters, vol. 8, no. 8, pp. 278-280, Aug 1998.