AFM analysis of organic silane thin films for bioMEMS applications

Surface and Interface Analysis

Volumn 35, Issue 2, 2003, Pages 205-215

  Popat, Ketul C ^a   Sharma, Sadhana ^a   Johnson, Robert W ^b   Desai, Tejal A ^a,c  

^a University of Illinois at Chicago   (United States)

^b ABBOTT LABORATORIES   (United States)

^c Boston University   (United States)

Author keywords

Atomic force microscopy; BioMEMS; PEG silane; Surface topography; Vinyltrichlorosilane

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; HYDROPHILICITY; HYDROPHOBICITY; MICROELECTROMECHANICAL DEVICES; PROTEINS; SILANES; SURFACE TOPOGRAPHY; VAPOR DEPOSITION;

BIOMEDICAL DEVICES;

ULTRATHIN FILMS;

EID: 0037325579     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1479     Document Type: Article

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