Fabrication and characteristics of rugate filters deposited by the TSH reactive sputtering method

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3384-3388

  Tang, Qi ^a   Matsuda, Hideaki ^a   Kikuchi, Kazuo ^a   Ogura, Shigetaro ^b  

^a Shincron Co Ltd   (Japan)

^b KOBE DESIGN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032328251     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581490     Document Type: Article

References (19)

1. B. G. Bovaud, Appl. Opt. 27, 1998 (1988).
2. B. G. Bovaud, Appl. Opt. 29, 24 (1990).
3. B. G. Bovaud, Appl. Opt. 32, 5427 (1993).
4. J. P. Heuer, J. P. Eblen, R. L. Hall, and W. J. Gunning, in Optical Interference Coatings, OSA Technical Digest Series (OSA, 1992), Vol. 15, p. 122.
5. R. Y. Tsai, C. T. Wei, and F. C. Ho, Proc. SPIE 2046, 189 (1993).
6. G. A. Al-Jumaily, T. A. Mooney, W. A. Spurgeon, and H. M. Dauplaise, J. Vac. Sci. Technol. A 7, 2280 (1989).
7. J. B. Adolph, R. W. Bertram, K. L. Yan, and Renato de Leon, Proc. SPIE 2046, 141 (1993).
8. H. Sankur, W. Southwell, and W. J. Gunning, in Optical Interference Coatings, OSA Technical Digest Series (OSA, 1992), Vol. 15, p. 125.
9. S. C. Miller and K. K. Mackamul, in Optical Interference Coatings, OSA Technical Digest Series (OSA, 1995), Vol. 17, p. 172.
10. Thin Films on Glass, edited by H. Bach and D. Krause (Springer, Berlin, 1997).
11. D. Poitras, J. E. Klemberg-Sapieha, A. Moussi, and L. Martinu, Proc. SPIE 2046, 179 (1993).
12. Q. Tang, S. Ogura, M. Yamasaki, and Kikuchi, J. Vac. Sci. Technol. A 15, 2670 (1997).
13. R. Jacobsson, Phys. Thin Films 8, 51 (1975).
14. E. Delano, J. Opt. Soc. Am. 57, 1529 (1967).
15. J. A. Dobrowolski and D. Lowe, Appl. Opt. 17, 3039 (1978).
16. P. G. Verly, J. A. Dobrowolski, W. J. Wild, and R. L. Brurton, Appl. Opt. 28, 2864 (1989).
17. P. G. Verly and J. A. Dobrowolski, Appl. Opt. 29, 3672 (1990).
18. P. G. Verly, Appl. Opt. 34, 688 (1995).
19. R. L. Hall, in Optical Interference Coatings, OSA Technical Digest Series (OSA, 1992), Vol. 15, p. 116.