Replication of continuous-profiled micro-optical elements for silicon integration

Applied Optics

Volumn 45, Issue 1, 2006, Pages 83-89

  Hedsten, Karin ^a   Magnusson, Anders ^a   Melin, Jonas ^b   Enoksson, Peter ^a   Bengtsson, Jörgen ^a   Nikolajeff, Fredrik ^b   Karlén, David ^a   Rödjegård, Henrik ^c   Andersson, Gert ^c  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; MICROSTRUCTURE; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES; SILICON; STRUCTURAL ANALYSIS; WSI CIRCUITS;

DIFFRACTIVE STRUCTURES; SILICON INTEGRATION; SILICON MICROSTRUCTURING;

DIFFRACTIVE OPTICS;

EID: 30844463026     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000083     Document Type: Article

References (11)

1. K. Ishikawa, J. Zhang, A. Tuantranont, V. M. Bright, and Y. C. Lee, "An integrated micro-optical system for VCSEL-to-fiber active alignment," Sens. Actuators A 103, 109-115 (2003).
2. A. Tuantranont, V. M. Bright, J. Zhang, W. Zhang, J. A. Neff, and Y. C. Lee, "Optical beam steering using MEMS-controllable microlens array," Sens. Actuators A 91, 363-372 (2001).
3. H. Toshiyoshi, G.-D. J. Su, J. LaCosse, and M. C. Wu, "A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process," J. Lightwave Technol. 21, 1700-1708 (2003).
4. L. R. Senesac, R. H. Farahi, J. L. Corbeil, D. D. Earl, S. Rajic, and P. G. Datskos, "Fabrication of integrated diffractive microoptics for MEMS applications," in Optical Manufacturing and Testing IV, H. P. Stahl, eds., Proc. SPIE 4451, 295-305 (2001).
5. C.-H. Kim and Y.-K. Kim, "Micro xy-stage using silicon on a glass substrate," J. Micromech. Microeng. 12, 103-107 (2002).
6. H. Toshiyoshi, G. J. Su, J. LaCosse, and M. C. Wu, "Micro optical scanners of photoresist reflow lens on MEMS xy-stage," Seisan-Kenkyu 53, 91-95 (2001).
7. M. T. Gale, "Replicated diffractive optics and micro-optics," Opt. Photon. News 14, 24-29 (2003).
8. Asahi Glass Company, "Technical information amorphous fluorocarbon polymer," 1997.
9. J. Bengtsson, "Direct inclusion of the proximity effect in the calculation of kinoforms," Appl. Opt. 33, 4993-4996 (1994).
10. M. Larsson, M. Ekberg, F. Nikolajeff, and S. Hard, "Successive development optimization of resist kinoforms manufactured with direct-writing, electron-beam lithography," Appl. Opt. 33, 1176-1179 (1994).
11. K. W. Oh, A. Han, S. Bhansali, and C. H. Ahn, "A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble microsystems," J. Micromech. Microeng. 12, 187-191 (2002).