Fabrication of integrated diffractive micro-optics for MEMS applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 295-305

  Senesac, L R ^a   Farahi, R H ^a   Corbeil, J L ^a   Earl, D D ^a   Rajic, S ^a   Datskos, P G ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Diffraction; Fresnel zone plate; IR imaging; MEMS; Optical readout

Indexed keywords

DIFFRACTION GRATINGS; INFRARED IMAGING; INTEGRATED OPTICS; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MILLING (MACHINING); SPUTTERING;

FRESNEL ZONE PLATE; OPTICAL READOUT;

OPTICAL TESTING;

EID: 0035761740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453628     Document Type: Conference Paper

References (4)

1. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1991).
2. E. Hecht, Optics 2nd Edition, pp. 445-446 (Addison Wesley, Reading Massachusetts, 1987)
3. P. G. Datskos, S. Rajic, L. R. Senesac, D. D. Earl, B. M. Evans, J. L. Corbeil, and I. Datskou, "Optical readout of uncooled thermal detectors," Infrared Technology and Applications XXVI, SPIE 4130, 185 (2000).
4. P. G. Datskos, S. Rajic, and I. Datskou, "Photoinduced and thermal stress in silicon microcantilevers," Applied Physics Letters 73, 16 (1998).