Extreme UV optical constants of rare-earth metals free from effects of air contamination

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5919, Issue , 2005, Pages 1-8

  Uspenskii, Yu ^a   Seely, J ^b   Popov, N ^a   Artioukov, I ^a   Vinogradov, A ^a   Windt, D ^a,c   Kjornrattanawanich, B ^d  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^b NAVAL RESEARCH LABORATORY   (United States)

^c Och Spine at New York Presbyterian Hospitals   (United States)

^d UNIVERSITIES SPACE RESEARCH ASSOCIATION   (United States)

Author keywords

EUV optical constants; Rare earth metals

Indexed keywords

ABSORPTION; AIR POLLUTION; MATHEMATICAL TECHNIQUES; OPTICAL MATERIALS;

AIR CONTAMINATION; EUV OPTICAL CONSTANTS; RARE EARTH METALS;

RARE EARTH ADDITIONS;

EID: 30844435069     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.620042     Document Type: Conference Paper

References (8)

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