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Volumn 866, Issue , 2005, Pages 163-167

The impact of deposition parameters on the optical and compositional properties of Er doped SRSO thin films deposited by ECR-PECVD

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); ORGANOMETALLICS; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THIN FILMS;

ELASTIC RECOIL DETECTION (ERD); OXYGEN FLOW RATE; OXYGEN RATIO;

ERBIUM;

EID: 30644475734 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-866-v5.7/ff5.7 Document Type: Conference Paper

Times cited : (2)

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