Conductivity enhancement in thin silicon-on-insulator layer embedding artificial dislocation network

Materials Research Society Symposium Proceedings

Volumn 864, Issue , 2005, Pages 253-258

  Ishikawa, Yasuhiko ^a   Yamauchi, Kazuaki ^a   Yamamoto, Chihiro ^a   Tabe, Michiharu ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LATTICE CONSTANTS; SILICON; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

DISLOCATION NETWORKS; DONOR-LIKE GAP STATES; SI BICRYSTALS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 30644475276     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-864-e6.5     Document Type: Conference Paper

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