Scanning probe microscopy and spectroscopy: From basic research to industrial applications

Informacije MIDEM

Volumn 27, Issue 4, 1997, Pages 246-250

  Born, Axel ^a   Wiesendanger, Roland ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

Defect analysis; IC; Integrated Circuits; Process characterization; Process monitoring; Scanning Probe Microscopy; Semiconductor devices; Semiconductor storage devices; Semiconductors; SPM; UHDS devices; Ultra High Density Storage devices

Indexed keywords

EID: 3042900296     PISSN: 03529045     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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