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Volumn , Issue , 2004, Pages 137-140

Force dependence of RF MEMS switch contact heating

Author keywords

[No Author keywords available]

Indexed keywords

HEATING; MATHEMATICAL MODELS; PLASTIC DEFORMATION; SEMICONDUCTOR SWITCHES; SINTERING; SURFACE ROUGHNESS;

EID: 3042825189     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (17)

References (16)
  • 1
    • 0032140571 scopus 로고    scopus 로고
    • MEMS microrelays
    • R. Wood et al., "MEMS microrelays," Mechatronics, vol. 8, pp. 535-547, 1998.
    • (1998) Mechatronics , vol.8 , pp. 535-547
    • Wood, R.1
  • 2
    • 0030675959 scopus 로고    scopus 로고
    • Measurement and modeling of surface micromachined, electrostatically actuated microswitches
    • S. Majumder et al., "Measurement and modeling of surface micromachined, electrostatically actuated microswitches", in Transducers 1997, pp. 1145-1148.
    • Transducers 1997 , pp. 1145-1148
    • Majumder, S.1
  • 3
    • 0035284280 scopus 로고    scopus 로고
    • MEMS microswitches for reconfigurable microwave circuitry
    • S. Duffy et al., "MEMS microswitches for reconfigurable microwave circuitry," IEEE Microwave & Wireless Comp. Letters, vol. 11, pp. 106-108, 2001.
    • (2001) IEEE Microwave & Wireless Comp. Letters , vol.11 , pp. 106-108
    • Duffy, S.1
  • 5
    • 0036070432 scopus 로고    scopus 로고
    • RF power handling of capacitive RF MEMS devices
    • B. Pillans et al., "RF power handling of capacitive RF MEMS devices," in 2002 IEEE MTT-S Digest, pp. 329- 332.
    • 2002 IEEE MTT-S Digest , pp. 329-332
    • Pillans, B.1
  • 6
    • 0033537519 scopus 로고    scopus 로고
    • Contact measurements providing basic design data for microrelay actuators
    • J. Schimkat, "Contact measurements providing basic design data for microrelay actuators," Sensors and Actuators, vol. 73, pp. 138-143, 1999.
    • (1999) Sensors and Actuators , vol.73 , pp. 138-143
    • Schimkat, J.1
  • 8
    • 0035948942 scopus 로고    scopus 로고
    • Study of contacts in an electrostatically actuated microswitch
    • S. Majumder et al., "Study of contacts in an electrostatically actuated microswitch," Sensors and Actuators, vol. 93, pp. 19-26, 2001.
    • (2001) Sensors and Actuators , vol.93 , pp. 19-26
    • Majumder, S.1
  • 9
    • 0032594983 scopus 로고    scopus 로고
    • Lateral MEMS microcontact considerations
    • E.J.J. Kruglick, K.S.J. Pister, "Lateral MEMS microcontact considerations," J. MEMS, vol. 8, 1999, pp. 264- 271.
    • (1999) J. MEMS , vol.8 , pp. 264-271
    • Kruglick, E.J.J.1    Pister, K.S.J.2
  • 14
    • 0141988709 scopus 로고    scopus 로고
    • Fully integrated electrothermal multidomain modeling of RF MEMS switches
    • B.D. Jensen et al., "Fully integrated electrothermal multidomain modeling of RF MEMS switches," IEEE Microwave & Wireless Comp. Letters, vol 13, pp. 364- 366, 2003.
    • (2003) IEEE Microwave & Wireless Comp. Letters , vol.13 , pp. 364-366
    • Jensen, B.D.1
  • 15
    • 0036767701 scopus 로고    scopus 로고
    • Constriction resistance at high signal frequencies
    • J.D. Lavers, R.S. Timsit, "Constriction resistance at high signal frequencies," IEEE Trans. Comp. Pack. Tech., vol. 25, pp. 446-452, 2002.
    • (2002) IEEE Trans. Comp. Pack. Tech. , vol.25 , pp. 446-452
    • Lavers, J.D.1    Timsit, R.S.2
  • 16
    • 0242481939 scopus 로고
    • Electrical conduction in solids. I. Influence of the passage of current on the contact between solids
    • F.P. Bowden, J.B.P. Williamson, "Electrical Conduction in Solids. I. Influence of the Passage of Current on the Contact between Solids," Proc. Roy. Soc. London. Series A, Math. and Phys. Sciences, vol. 246, pp. 1-12, 1958.
    • (1958) Proc. Roy. Soc. London. Series A, Math. and Phys. Sciences , vol.246 , pp. 1-12
    • Bowden, F.P.1    Williamson, J.B.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.