Investigation of high-k dielectric properties with the non-contact SASS technique

Proceedings - Electrochemical Society

Volumn 22, Issue , 2003, Pages 425-440

  Wilson, Marshall ^a   Lagowski, Jacek ^a   D'Amico, John ^a   Edelman, Piotr ^a   Savtchouk, Alexandre ^a  

^a Semiconductor Diagnostics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LEAKAGE CURRENT; NON-CONTACT HIGH-K MONITORING TECHNIQUES; PULSED CORONA CHARGING; SELF-ADJUSTING STEADY STATE (SASS);

ELECTRON TUNNELING; HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; MATHEMATICAL MODELS; MOS CAPACITORS; PERMITTIVITY; VOLTAGE MEASUREMENT;

DIELECTRIC PROPERTIES;

EID: 3042817333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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