Investigation of electrodischarge micromachining controllable factors on machined silicon surface quality

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 215, Issue 6, 2001, Pages 811-817

  Yeo, S H ^a   Nachiappan, R ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Electrodischarge micromachining (micro EDM); Silicon; Surface integrity

Indexed keywords

EID: 0010310318     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/0954405011518746     Document Type: Article

References (9)

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