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Volumn , Issue , 2004, Pages 117-120

NiW-Micro springs for chip connection

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROLYTES; ELECTROPLATING; ETCHING; FINITE ELEMENT METHOD; FLIP CHIP DEVICES; SPRINGS (COMPONENTS);

EID: 3042783194     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (10)
  • 5
    • 0036803865 scopus 로고    scopus 로고
    • Galvanisch abgeschiedene NiW-legierungsschichten für die Mikrosystemtechnik, Teil 2: Abscheidungen auf der basis eines sulfamatelektrolyten
    • Th. Fritz, W. Mokwa, U. Schnakenberg, "Galvanisch abgeschiedene NiW-Legierungsschichten für die Mikrosystemtechnik, Teil 2: Abscheidungen auf der Basis eines Sulfamatelektrolyten", Galvanotechnik, 92 (10), 2002, pp. 2684-2690.
    • (2002) Galvanotechnik , vol.92 , Issue.10 , pp. 2684-2690
    • Fritz, Th.1    Mokwa, W.2    Schnakenberg, U.3
  • 7
    • 3042857093 scopus 로고    scopus 로고
    • PhD thesis, Technical University Berlin
    • J. Schimkat, PhD thesis, Technical University Berlin (1996).
    • (1996)
    • Schimkat, J.1
  • 8
    • 26344473305 scopus 로고    scopus 로고
    • PhD thesis, Aachen University
    • C. Krüger, PhD thesis, Aachen University (2003).
    • (2003)
    • Krüger, C.1
  • 10
    • 0024069463 scopus 로고
    • Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films
    • T. Weihs, S. Hong, J. Bravman, W. Nix, "Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films", J. Mat. Res., 3 (5), 1988, pp. 931-942.
    • (1988) J. Mat. Res. , vol.3 , Issue.5 , pp. 931-942
    • Weihs, T.1    Hong, S.2    Bravman, J.3    Nix, W.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.